The effect of ion energy application on damage induced in (S)TEM samples and the area of their creation respectively to the sample surface using different ion species and techniques

Presenting Author(s)

• 

  Martin Sláma (he/him/his)

  Product Marketing Manager
  TESCAN Group
  Brno, Jihomoravsky kraj, Czech Republic

Co-Author(s)

• SB

  Shibabrata Basak

  Forschungszentrum Jülich, United States
• 

  Lucille A Giannuzzi, PhD (she/her/hers)

  Business Development Manager
  TESCAN USA, United States
• LA

  Lara Ahrens

  Forschungszentrum Jülich GmbH, United States
• RE

  Rüdiger‑A. Eichel

  Forschungszentrum Jülich, United States