Physical Sciences Symposia

Perspectives and Limitations of STEM EBIC Measurements for the Characterization of Semiconductor Devices

Presenting Author(s)

• SS

  Sebastian Schneider (he/him/his)

  DCN, TU Dresden
  Dresden, Germany

Co-Author(s)

• 

  Pohl Darius (he/him/his)

  DCN, TU Dresden, United States
• 

  Bernd Rellinghaus

  Director
  DCN, TU Dresden
  Dresden Center for Nanoanalysis (DCN) - TU Dresden
  Dresden, Sachsen, United States