Analytical Sciences Symposia

Precision Sputtering of Diamond and Boron Carbide with Plasma Focused Ion Beams for High-aspect-ratio Milling

Presenting Author(s)

• SS

  Swanee J. Shin, Ph.D (he/him/his)

  Staff Scientist
  Lawrence Livermore National Laboratory
  Livermore, CA, United States

Co-Author(s)

• DG

  Daniel Goodelman

  Lawrence Livermore National Laboratory, United States
• LB

  Leonardus Bimo Bayu Aji

  Lawrence Livermore National Laboratory, United States
• JF

  Jean-Baptiste Forien

  Lawrence Livermore National Laboratory, United States
• EK

  Eunjeong Kim

  Lawrence Livermore National Laboratory, United States
• SK

  Sergei Kucheyev

  Lawrence Livermore National Laboratory, United States