Analytical Sciences Symposia

Impact of SEM Parameters on Electron Beam-Induced Heating: Experimental and Simulation Insights

Presenting Author(s)

• JJ

  Joerg Jinschek, Prof. (he/him/his)

  Professor
  Technical University of Denmark (DTU)
  Technical University of Denmark (DTU)
  Kgs Lyngby, Hovedstaden, Denmark

Co-Author(s)

• CK

  Christina Koenig (she/her/hers)

  Technical University of Denmark (DTU), Denmark
• AF

  Alice Fanta (she/her/hers)

  Sr. Researcher
  Technical University of Denmark (DTU)
  Copenhagen, Denmark