Physical Sciences Symposia

In-situ TEM Combined with Laser Induced Heating to Initiate Controlled Silicon Nitride Crystallization to Study Reaction Kinetics for Microelectronics Applications

Presenting Author(s)

• 

  Elijah M. Davis, Ph.D (he/him/his)

  Post Doctoral Researcher
  University of Tennessee Knoxville
  University of Tennessee Knoxville
  Knoxville, TN, United States

Co-Author(s)

• 

  Paul G. Kotula, PhD

  Distinguished Member of Technical Staff
  Sandia National Laboratories
  Albuquerque, NM, United States
• CC

  Carlos Chacon, Ph.D

  Sandia National Laboratories, United States
• EC

  Edwin Chiu, Ph.D

  Sandia National Laboratories, United States
• AR

  Aashique Rezwan, Ph.D

  Sandia National Laboratories, United States
• TJ

  Tesia Janicki, Ph.D

  Sandia National Laboratories, United States
• JL

  J. Matthew Lane, Ph.D

  Sandia National Laboratories, United States
• HL

  Hojun Lim, Ph.D

  Sandia National Laboratories, United States
• CB

  Christopher Bishop, Ph.D

  Sandia National Laboratories, United States
• KH

  Khalid Hattar, Ph.D (he/him/his)

  Associate Professor
  University of Tennessee Knoxville
  Knoxville, Tennessee, United States