3D-Micromac AG | How Femtosecond Laser Systems Accelerate Sample Preparation Workflows

Booth 2118

In this tutorial, we will discuss how femtosecond laser systems are advancing the conventional sample preparation workflows. The microPREP® PRO FEMTO system, featuring ultrashort femtosecond lasers, enables athermal ablation, minimizing thermal damage while providing high-precision material removal. This innovative approach significantly accelerates the sample preparation process, reducing it from hours to minutes, while ensuring the accuracy needed for complex device architectures.
The session will focus on how integrating laser ablation with FIB-SEM workflows can enhance preparation processes, enabling rapid, large-volume material removal and improving high-throughput analysis. Key challenges in sample preparation will be addressed, such as achieving nanometer-scale precision, avoiding artifacts, and boosting throughput. The focus will lie on semiconductor and material science applications.
Through case studies and practical insights, you will learn how the microPREP® PRO FEMTO system efficiently prepares challenging samples, from APT microtips to flip-chip packages, while preserving sample integrity. This tutorial will highlight how combining laser-based workflows with FIB-SEM systems can provide a faster, more reliable path to high-quality results in materials and semiconductor research.