RAITH America | VECTOR Automated SEM – A Powerful New Tool for Automated Inspection & Metrology

Booth 1433

Raith will demonstrate the new VECTOR automated SEM-based metrology platform, designed to enable high-throughput, wafer-scale critical dimension (CD) measurements across thousands of sites per sample. Key hardware features, including an interferometer-driven stage and integrated laser height sensing, support precise and repeatable measurements across full wafers or multiple piece parts. The tutorial will include a Design of Experiments (DOE) workflow used to optimize electron beam lithography (EBL) parameters. With its robust automation and long-term stability, VECTOR offers a powerful solution for both research and production environments.