P10.3 - Innovative in-situ Imaging Techniques for Material Characterization, Synthesis, and Processing

Session Chair(s)

• 

  Qian Chen

  Associate Professor
  University of Illinois Urbana-Champaign
  Urbana, Illinois, United States

Presentations:

• 10:30 AM - 11:00 AM MT

  Enhancing In Situ TEM Characterization of RRAM Devices via Optimized Chip Carrier Designs
  

  Presenting Author: Leopoldo Molina-Luna, Prof. Dr. rer. nat. (he/him/his) – TU Darmstadt, AEM

  Co-Author: Robert Eilhardt, Ph.D – Institute of Materials Science, Department of Materials and Earth Sciences, Technical University of Darmstadt,

  Co-Author: Daniel Vasquez (he/him/his) – TU Darmstadt

  Co-Author: Alexander Fakiner (he/him/his) – TU Darmstadt

  Co-Author: A. Wahab Shakib (he/him/his) – TU Darmstadt
• 11:00 AM - 11:15 AM MT

  Direct Observation of Electron Tunneling from Plasmonic Nanostructures under Electron Beam Irradiation
  

  Presenting Author: Kenan Elibol – Max Planck Institute for Solid State Research

  Co-Author: Vesna Srot – Max Planck Institute for Solid State Research, Stuttgart, Germany

  Co-Author: Chao Yang – Max Planck Institute for Solid State Research

  Co-Author: Sayooj Satheesh – Max Planck Institute for Solid State Research

  Co-Author: Serkan Arslan – University of Stuttgart

  Co-Author: Marko Burghard – Max Planck Institute for Solid State Research

  Co-Author: Harald Giessen – University of Stuttgart

  Co-Author: Peter A. van Aken – Max Planck Institute for Solid State Research
• 11:15 AM - 11:30 AM MT

  The Crucial Role of TEM Specimen Preparation in STEM EBIC Analysis of Advanced Semiconductor Devices
  

  Presenting Author: Cecile S. Bonifacio, PhD (she/her/hers) – E.A. Fischione Instruments Inc.

  Co-Author: William Hubbard, PhD – NanoElectronic Imaging Inc.

  Co-Author: Richard Li – E. A. Fischione Instruments, Inc.

  Co-Author: Mary Ray – E. A. Fischione Instruments, Inc.

  Co-Author: Paul Fischione – E. A. Fischione Instruments, Inc.
• 11:30 AM - 11:45 AM MT

  Perspectives and Limitations of STEM EBIC Measurements for the Characterization of Semiconductor Devices
  

  Presenting Author: Sebastian Schneider (he/him/his) – DCN, TU Dresden

  Co-Author: Pohl Darius (he/him/his) – DCN, TU Dresden

  Co-Author: Bernd Rellinghaus – DCN, TU Dresden
• 11:45 AM - 12:00 PM MT

  SE For Free: Constructing Secondary Electron Images from Two-Channel STEM EBIC
  

  Presenting Author: William Hubbard, PhD – NanoElectronic Imaging Inc.

  Co-Author: B. C. C. Regan – UCLA