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Final Program


A07.5 - Advances in SEM Instrumentation, Application and Techniques

Thursday, July 31, 2025
1:30 PM - 3:00 PM MT
Location: 251 B

Presentations:

  • 1:30 PM - 1:45 PM MT
    Quantifying the surface sensitivity of atomic resolution secondary electron imaging

    Presenting Author: Joel Martis, PhD – Bruker AXS LLC

    Co-Author: Benjamin Plotkin-Swing – Bruker AXS LLC

    Co-Author: Michael T. Hotz – Bruker AXS LLC

    Co-Author: Niklas Dellby – Bruker AXS LLC

    Co-Author: Cong Su, PhD – Yale University

    Co-Author: Ondrej L. Krivanek – Bruker AXS LLC

    Co-Author: Tracy Lovejoy – Bruker AXS LLC

  • 1:45 PM - 2:00 PM MT
    4D-STEM in SEM With 1 Million Frames Per Second: Enabling Ptychography and Advanced 4D-STEM Processing

    Presenting Author: Erik Hogenbirk (he/him/his) – Amsterdam Scientific Instruments

    Co-Author: Thorbjoern Schoenbeck – Amsterdam Scientific Instruments

    Co-Author: Dmitry Byelov – Amsterdam Scientific Instruments

  • 2:00 PM - 2:15 PM MT
    Enhancing Diffraction in SEM: Using Hybrid-Pixel Detectors with Low Energy Sensitivity

    Presenting Author: Pavel Stejskal – AdvaScope

  • 2:15 PM - 2:30 PM MT
    Using the Capabilities of an Advanced Silicon Production Line to Minimize the Spatial Footprint of BSE Detection Without Compromising Performance

    Presenting Author: Maximilian Schmid, Ph.D (he/him/his) – PNDetector GmbH

    Co-Author: Simon Noever, Ph.D (he/him/his) – PNDetector

    Co-Author: Mozhdeh Abbasi, Ph.D (she/her/hers) – PNDetector GmbH

    Co-Author: Alessia Mafodda, Ph.D (she/her/hers) – PNDetector GmbH

    Co-Author: Stefan Aschauer, Ph.D (he/him/his) – PNDetector GmbH

  • 2:30 PM - 2:45 PM MT
    Electron-beam Readiness Check On In-line Defect Inspection SEM Tool In Semiconductor High-Volume Manufacturing Industry Using Advanced Edge Derivative Algorithm

    Presenting Author: Wendi Zhang (she/her/hers) – ASML

    Co-Author: Roger Alvis – ASML

    Co-Author: Zhe Yu – ASML

    Co-Author: Lester Wang – ASML

  • 2:45 PM - 3:00 PM MT
    Wire-Print as a Sample Preparation Procedure Suitable for Accurate Morphological Characterization of Constituent Particles for Graphene-Related 2D-Materials

    Presenting Author: Paul Mrkwitschka – Bundesanstalt für Materialforschung und -prüfung

    Co-Author: Mario Sahre (he/him/his) – Bundesanstalt für Materialforschung und -prüfung

    Co-Author: Elena Corrao, Ph.D (she/her/hers) – University of Turin

    Co-Author: Francesco Pellegrino, Ph.D (he/him/his) – University of Turin

    Co-Author: Vasile-Dan Hodoroaba, Ph.D (he/him/his) – Bundesanstalt für Materialforschung und -prüfung