A07.4 - Advances in SEM Instrumentation, Application and Techniques

Session Chair(s)

• DB

  Dirk Berger (he/him/his)

  Technische Universitaet Berlin
  Technische Universitaet Berlin
• 

  Ute Golla-Schindler, Dr. (she/her/hers)

  Dr.
  Aalen University of Applied Sciences
  Materials Research Institute (IMFAA)
  Aalen, Baden-Wurttemberg, Germany
• 

  Marc Willinger

  TU Munich
  TU Munich
  Garching, Bayern, Germany

Presentations:

• 8:30 AM - 8:45 AM MT

  Secondary Electron Plume Imaging and Applications for Mapping Electric Fields
  

  Presenting Author: Francis M. Alcorn, Ph.D – Sandia National Labs

  Co-Author: Christopher Perez, Ph.D. – Sandia National Labs

  Co-Author: Eric J. Smoll, Ph.D. – Sandia National Labs

  Co-Author: Debjit Ghoshal, Ph.D. – National Renewable Energy Lab

  Co-Author: Elena Salagre, Ph.D – Sandia National Labs

  Co-Author: Elliot J. Fuller, Ph.D – Sandia National Labs

  Co-Author: Jeffrey L. Blackburn, Ph.D. – National Renewable Energy Lab

  Co-Author: Albert A. Talin, Ph.D – Sandia National Labs

  Co-Author: David W. Chandler, Ph.D – Sandia National Labs

  Co-Author: Suhas Kumar, Ph.D – Sandia National Labs
• 8:45 AM - 9:00 AM MT

  Physical limits of the detection of X-rays and electrons in SEM and TEM applications
  

  Presenting Author: Björn Eckert (he/him/his) – PNDetector GmbH

  Co-Author: Lothar Strueder – PNSensor GmbH

  Co-Author: Martin Huth – PNDetector GmbH

  Co-Author: Petra Majewski – PNDetector GmbH

  Co-Author: Andrew Fram – PNDetector GmbH

  Co-Author: Adrian Niculae – PNDetector GmbH

  Co-Author: Heike Soltau – PNDetector GmbH
• 9:00 AM - 9:15 AM MT

  Wavelength Dispersive Spectrometry (WDS) - Is There Something Better Than Gas Flow X-Ray Detectors?
  

  Presenting Author: Patrick P. Camus, Ph.D (he/him/his) – Self

  Co-Author: Ken Moran – Moran Scientific

  Co-Author: Michael Matthews, Ph.D (he/him/his) – AWE

  Co-Author: Richard Wuhrer, Ph.D – Western Sydney University (WSU)
• 9:15 AM - 9:30 AM MT

  E-Beam Probing: A Revolutionary Solution for Backside Power Delivery Network (PDN) and Backside Power Vias in Advanced Integrated Circuits
  

  Presenting Author: Nitin Varshney – University of Florida

  Co-Author: M Shafkat M Khan – University of Florida

  Co-Author: Navid Asadizanjani – University of Florida
• 9:30 AM - 9:45 AM MT

  From EBIC to Scanning Transmission EBIC: Probing Functional Oxide-Based Two Terminal Lamella Devices
  

  Presenting Author: Daniel Vasquez, M.Sc. (he/him/his) – TU Darmstadt, AEM

  Co-Author: Robert Winkler, Dr.-Ing. (he/him/his) – TU Darmstadt, AEM

  Co-Author: Alexander Fakiner, M.Sc. (he/him/his) – TU Darmstadt, AEM

  Co-Author: A. Wahab Shakib, B.Sc. (he/him/his) – TU Darmstadt, AEM

  Co-Author: Leopoldo Molina-Luna, Prof. Dr. rer. nat. (he/him/his) – TU Darmstadt, AEM
• 9:45 AM - 10:00 AM MT

  Experimental Analysis of Detector Noise in Scanning Electron Microscopy
  

  Presenting Author: Surya Kamal, Ph.D (he/him/his) – Rochester Institute of Technology

  Co-Author: Kevin Mogere Nyaburi (he/him/his) – Rochester Institute of Technology

  Co-Author: Richard Hailstone – Rochester Institute of Technology