Michael Iwatake (he/him/his)

IBM
Albany, New York, United States

Disclosure information not submitted.

Presentation(s):

• A BKM by Analytical TEM to Effectively Characterize Electromigration Voids versus Grain Orientations in the Integration and Evaluation of Subtractive Ru BEOL Interconnect

  Tuesday, July 29, 2025
  2:15 PM - 2:30 PM MT